With a real-time wavefront analysis speed of up to 107 frames per second, the BOJIONG Ultra High-speed Four-wave Interferometric Sensor far exceeds the capabilities of traditional interferometric measurement techniques, making it suitable for rapid measurements in dynamic environments.
Its spectral response range covers 400 to 1100 nanometers, allowing it to adapt to various light source conditions and enhancing its applicability in different application scenarios. It has now become an indispensable tool in high-speed industrial inspection, national defense technology research, and precision scientific research fields.
Product name |
Ultra High-speed Four-wave Interferometric Sensor |
Wavelength range |
400nm~1100nm |
Target size |
10.24mm×10.24mm |
Spatial resolution |
24.4μm |
Sampling resolution |
420×420(176400pixel) |
Phase resolution |
<2nmRMS |
Absolute accuracy |
10nmRMS |
Dynamic range |
132μm(210λ) |
Sampling rate |
107fps |
Real-time processing speed |
10Hz(Full resolution) |
Interface type |
Supports delayed batch processing |
Dimension |
GIGE |
Weight |
56.5mm×43mm×41.5mm |
Wavelength range |
about 120g |
◆Ultra-high resolution of 420×420 (176400) phase points
◆Sampling frame rate up to 107fps
◆Single-channel light self-interference, no reference light required
◆Broad spectrum 400nm~1100nm band
◆2nm RMS high phase resolution
◆Extremely strong anti-vibration performance, no need for optical vibration isolation
◆Just like imaging, easy and fast optical path construction
◆Supports collimated beams and large NA converged beams
This BOJIONG Ultra High-speed Four-wave Interferometric Sensorused in wafer surface roughness detection, silicon-based and glass substrate micro-morphology measurement, aerodynamic optics, high-speed flow field, gas plasma density measurement.
laser beam wavefront detection |
Optical planar surface shape measurement |
Example of wafer surface roughness measurement |
Reconstructed wavefront graph measurement example |
Gas plasma density measurement optical path |
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BOJIONG High Resolution Four-wave Interferometric Sensor developed by a team of professors from Zhejiang University and Nanyang Technological University of Singapore, with domestic patented technology, it combines diffraction and interference to achieve a common four-wave transverse shear interference, with superior detection sensitivity and anti-vibration performance, and can realize real-time and high-speed dynamic interferometry without vibration isolation. The real-time measurement shows a frame rate of more than 10 frames.
At the same time, the FIS4 sensor has an ultra-high phase resolution of 512×512 (260,000 phase points), the measurement band covers 200nm~15μm, the measurement sensitivity reaches 2nm, and the measurement repeatability is better than 1/1000λ (RMS). It can be used for laser beam quality analysis, plasma flow field detection, real-time measurement of high-speed flow field distribution, image quality evaluation of optical system, microscopic profile measurement and quantitative phase imaging of biological cells.
FIS4 Technical parameters of each series of products |
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Product |
FIS4-UV |
FIS4-HR |
FIS4-UHR |
FIS4-HS |
FIS4-Cell |
FIS4-NIR |
Wavelength range |
200~450nm |
400~1100nm |
400~1100nm |
400~1100nm |
400~1100nm |
900~1200nm |
Target size mm² |
13.3×13.3 |
7.07×7.07 |
13.3×13.3 |
10.24×10.24 |
7.07×7.07 |
13.3×13.3 |
Spatial resolution |
26μm |
23.6μm |
26μm |
24.4μm |
23.6μm |
26μm |
Image pixel |
- |
2048×2048 |
- |
- |
2048×2048 |
- |
Phase output resolution |
512×512 (262144pixel) |
300×300(90000pixel) |
512×512(262144pixel) |
420×420(176400pixel) |
300×300(90000pixel) |
512×512(262144pixel) |
Phase resolution |
<2nmRMS |
<2nmRMS |
<2nmRMS |
<2nmRMS |
<2nmRMS |
<2nmRMS |
Absolute accuracy |
10nmRMS |
10nmRMS |
15nmRMS |
10nmRMS |
10nmRMS |
15nmRMS |
Dynamic range |
90μm (256λ) |
110μm (150λ) |
162μm (256λ) |
132μm (210λ) |
110μm (150λ) |
270μm (256λ) |
Sampling rate |
32fps |
24fps |
45fps |
107fps |
24fps |
45fps |
Real-time processing speed |
10Hz (Full resolution) |
10Hz (Full resolution) |
10Hz (Full resolution) |
10Hz (Full resolution)Supports delayed batch processing |
10Hz (Full resolution) |
10Hz (Full resolution) |
Interface type |
USB3.0 |
GIGE |
USB3.0 |
GIGE |
GIGE |
USB3.0 |
External interface |
- |
- |
- |
- |
C port |
- |
Size mm² |
70x46.5x68.5 |
56.5x43x41.5 |
70x46.5x68.5 |
56.5x43x41.5 |
56.5x43x41.5 |
70x46.5x68.5 |
weight |
about240g |
about120g |
about240g |
about120g |
about120g |
about240g |
Address
No. 578 Yingkou Road, Yangpu District, Shanghai, China
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