The Ultraviolet Four-wave Interferometric Sensor incorporates our proprietary technology of randomized coding four-wave diffraction, enabling interference at the back focal plane with minimal requirements for the coherence of the light source, thus eliminating the need for phase shifting. Through the ultraviolet imaging system, the sensor is capable of real-time wavefront measurement, exhibiting excellent vibration resistance and stability, and can achieve nanometer-level precision measurements even without the use of vibration isolation. BOJIONG Optoelectronics is poised to redefine the standards for optical performance measurement and analysis, leading the industry into a new era of precision and efficiency.
Product name |
Ultraviolet Four-wave Interferometric Sensor |
Wavelength range |
200nm~450nm |
Target size |
13.3mm×13.3mm |
Spatial resolution |
26μm |
Sampling resolution |
512×512(262144pixel) |
Phase resolution |
<2nmRMS |
Absolute accuracy |
10nmRMS |
Dynamic range |
90μm(256λ) |
Sampling rate |
32fps |
Real-time processing speed |
10Hz(Full resolution) |
Interface type |
USB3.0 |
Dimension |
70mm×46.5mm×68.5mm |
Weight |
about 240g |
◆UV spectrum 200nm~450nm band
◆Ultra-high resolution of 512×512 (262144) phase points
◆Single-channel light self-interference, no reference light required
◆2nm RMS high phase resolution
◆Extremely strong anti-vibration performance, no need for optical vibration isolation
◆Just like imaging, easy and fast optical path construction
◆Supports collimated beams and high NA non-collimated beams
This BOJIONG Ultraviolet Four-wave Interferometric Sensor used for optical system aberration measurement, optical system calibration, flat (wafer) surface shape measurement, optical spherical surface shape measurement, etc.
Laser beam wavefront detection |
Wavefront detection response of adaptive optics Zernike mode |
Example of aberration measurement of optical system |
Optical system calibration measurement examples |
Example of wafer surface roughness measurement |
Micro etching morphology measurement - defect sample 1 # -114 lines |
BOJIONG Ultraviolet Four-wave Interferometric Sensor developed by a team of professors from Zhejiang University and Nanyang Technological University of Singapore, with domestic patented technology, it combines diffraction and interference to achieve a common four-wave transverse shear interference, with superior detection sensitivity and anti-vibration performance, and can realize real-time and high-speed dynamic interferometry without vibration isolation. The real-time measurement shows a frame rate of more than 10 frames. At the same time, the FIS4 sensor has an ultra-high phase resolution of 512×512 (260,000 phase points), the measurement band covers 200nm~15μm, the measurement sensitivity reaches 2nm, and the measurement repeatability is better than 1/1000λ (RMS). It can be used for laser beam quality analysis, plasma flow field detection, real-time measurement of high-speed flow field distribution, image quality evaluation of optical system, microscopic profile measurement and quantitative phase imaging of biological cells.
FIS4 Technical parameters of each series of products |
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Product |
FIS4-UV |
FIS4-HR |
FIS4-UHR |
FIS4-HS |
FIS4-Cell |
FIS4-NIR |
Wavelength range |
200~450nm |
400~1100nm |
400~1100nm |
400~1100nm |
400~1100nm |
900~1200nm |
Target size mm² |
13.3×13.3 |
7.07×7.07 |
13.3×13.3 |
10.24×10.24 |
7.07×7.07 |
13.3×13.3 |
Spatial resolution |
26μm |
23.6μm |
26μm |
24.4μm |
23.6μm |
26μm |
Image pixel |
- |
2048×2048 |
- |
- |
2048×2048 |
- |
Phase output resolution |
512×512 (262144pixel) |
300×300(90000pixel) |
512×512(262144pixel) |
420×420(176400pixel) |
300×300(90000pixel) |
512×512(262144pixel) |
Phase resolution |
<2nmRMS |
<2nmRMS |
<2nmRMS |
<2nmRMS |
<2nmRMS |
<2nmRMS |
Absolute accuracy |
10nmRMS |
10nmRMS |
15nmRMS |
10nmRMS |
10nmRMS |
15nmRMS |
Dynamic range |
90μm (256λ) |
110μm (150λ) |
162μm (256λ) |
132μm (210λ) |
110μm (150λ) |
270μm (256λ) |
Sampling rate |
32fps |
24fps |
45fps |
107fps |
24fps |
45fps |
Real-time processing speed |
10Hz (Full resolution) |
10Hz (Full resolution) |
10Hz (Full resolution) |
10Hz (Full resolution)Supports delayed batch processing |
10Hz (Full resolution) |
10Hz (Full resolution) |
Interface type |
USB3.0 |
GIGE |
USB3.0 |
GIGE |
GIGE |
USB3.0 |
External interface |
- |
- |
- |
- |
C port |
- |
Size mm² |
70x46.5x68.5 |
56.5x43x41.5 |
70x46.5x68.5 |
56.5x43x41.5 |
56.5x43x41.5 |
70x46.5x68.5 |
weight |
about240g |
about120g |
about240g |
about120g |
about120g |
about240g |
SID4 UV HR - Ultra-Violet high resolution wavefront sensors 200-450 nm _ BOJIONG - BOJIONG
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No. 578 Yingkou Road, Yangpu District, Shanghai, China
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