The Ultraviolet Wavefront Sensor, featuring a high phase resolution of 2NM RMS and extremely strong vibration resistance. It also has a resolution of 512×512 pixels (262,144 phase points), capable of performing interference measurements at the rear focal plane. The technology requires the light source to have low coherence and eliminates the need for phase shifting. With the ultraviolet imaging system, the device is capable of real-time wavefront measurement.
product name |
Ultraviolet Wavefront Sensor |
Wavelength range |
200nm~450nm |
Target size |
13.3mm×13.3mm |
Spatial resolution |
26μm |
Sampling resolution |
512×512(262144pixel) |
Phase resolution |
<2nmRMS |
Absolute accuracy |
10nmRMS |
Dynamic range |
90μm(256λ) |
Sampling rate |
32fps |
Real-time processing speed |
10Hz(Full resolution) |
Interface type |
USB3.0 |
Dimension |
70mm×46.5mm×68.5mm |
Weight |
about 240g |
◆UV spectrum 200nm~450nm band
◆Ultra-high resolution of 512×512 (262144) phase points
◆Single-channel light self-interference, no reference light required
◆2nm RMS high phase resolution
◆Just like imaging, easy and fast optical path construction
◆Supports collimated beams and high NA non-collimated beams
◆Extremely strong anti-vibration performance, no need for optical vibration isolation
This BOJIONG Ultraviolet Wavefront Sensor used for optical system aberration measurement, optical system calibration, flat (wafer) surface shape measurement, optical spherical surface shape measurement, etc.
Laser beam wavefront detection |
Wavefront detection response of adaptive optics Zernike mode |
Example of aberration measurement of optical system
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Optical system calibration measurement examples
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Example of wafer surface roughness measurement
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Micro etching morphology measurement - defect sample 1 # -114 lines |
BOJIONG Ultraviolet Wavefront Sensor developed by a team of professors from Zhejiang University and Nanyang Technological University of Singapore, with domestic patented technology, it combines diffraction and interference to achieve a common four-wave transverse shear interference, with superior detection sensitivity and anti-vibration performance, and can realize real-time and high-speed dynamic interferometry without vibration isolation. The real-time measurement shows a frame rate of more than 10 frames. At the same time, the FIS4 sensor has an ultra-high phase resolution of 512×512 (260,000 phase points), the measurement band covers 200nm~15μm, the measurement sensitivity reaches 2nm, and the measurement repeatability is better than 1/1000λ (RMS). It can be used for laser beam quality analysis, plasma flow field detection, real-time measurement of high-speed flow field distribution, image quality evaluation of optical system, microscopic profile measurement and quantitative phase imaging of biological cells.
FIS4 Technical parameters of each series of products |
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Product |
FIS4-UV |
FIS4-HR |
FIS4-UHR |
FIS4-HS |
FIS4-Cell |
FIS4-NIR |
Wavelength range |
200~450nm |
400~1100nm |
400~1100nm |
400~1100nm |
400~1100nm |
900~1200nm |
Target size mm2 |
13.3×13.3 |
7.07×7.07 |
13.3×13.3 |
10.24×10.24 |
7.07×7.07 |
13.3×13.3 |
Spatial resolution |
26μm |
23.6μm |
26μm |
24.4μm |
23.6μm |
26μm |
Image pixel |
- |
2048×2048 |
- |
- |
2048×2048 |
- |
Phase output resolution |
512×512 (262144pixel) |
300×300(90000pixel) |
512×512(262144pixel) |
420×420(176400pixel) |
300×300(90000pixel) |
512×512(262144pixel) |
Phase resolution |
<2nmRMS |
<2nmRMS |
<2nmRMS |
<2nmRMS |
<2nmRMS |
<2nmRMS |
Absolute accuracy |
10nmRMS |
10nmRMS |
15nmRMS |
10nmRMS |
10nmRMS |
15nmRMS |
Dynamic range |
90μm (256λ) |
110μm (150λ) |
162μm (256λ) |
132μm (210λ) |
110μm (150λ) |
270μm (256λ) |
Sampling rate |
32fps |
24fps |
45fps |
107fps |
24fps |
45fps |
Real-time processing speed |
10Hz (Full resolution) |
10Hz (Full resolution) |
10Hz (Full resolution) |
10Hz (Full resolution)Supports delayed batch processing |
10Hz (Full resolution) |
10Hz (Full resolution) |
Interface type |
USB3.0 |
GIGE |
USB3.0 |
GIGE |
GIGE |
USB3.0 |
External interface |
- |
- |
- |
- |
C port |
- |
Size mm2 |
70x46.5x68.5 |
56.5x43x41.5 |
70x46.5x68.5 |
56.5x43x41.5 |
56.5x43x41.5 |
70x46.5x68.5 |
weight |
about240g |
about120g |
about240g |
about120g |
about120g |
about240g |
Address
No. 578 Yingkou Road, Yangpu District, Shanghai, China
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