Bojiong (Shanghai) Precision Machinery Technology Co., Ltd
Bojiong (Shanghai) Precision Machinery Technology Co., Ltd
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Ultraviolet Wavefront Sensor
  • Ultraviolet Wavefront SensorUltraviolet Wavefront Sensor

Ultraviolet Wavefront Sensor

For the wavefront detection of planar wafer surface shapes in the 200-nanometer to 450-nanometer wavelength range, BOJIONG has introduced the Ultraviolet Wavefront Sensor. Utilizing single-path self-interference technology, it does not require a reference beam. Our products and services are extensively used in fields such as optical manufacturing, aerospace, biomedical, and energy research. We are continuously expanding our production capacity, enhancing our technical capabilities, and have established a robust corporate operational framework.


The Ultraviolet Wavefront Sensor, featuring a high phase resolution of 2NM RMS and extremely strong vibration resistance. It also has a resolution of 512×512 pixels (262,144 phase points), capable of performing interference measurements at the rear focal plane. The technology requires the light source to have low coherence and eliminates the need for phase shifting. With the ultraviolet imaging system, the device is capable of real-time wavefront measurement.

 

Item Specification:

 

product name

Ultraviolet Wavefront Sensor

Wavelength range

200nm~450nm

Target size

13.3mm×13.3mm

Spatial resolution

26μm

Sampling resolution

512×512(262144pixel)

Phase resolution

<2nmRMS

Absolute accuracy

10nmRMS

Dynamic range

90μm(256λ)

Sampling rate

32fps

Real-time processing speed

10Hz(Full resolution)

Interface type

USB3.0

Dimension

70mm×46.5mm×68.5mm

Weight

about 240g


Feature Of BOJIONG Ultraviolet Wavefront Sensor

 

 


◆UV spectrum 200nm~450nm band

◆Ultra-high resolution of 512×512 (262144) phase points

◆Single-channel light self-interference, no reference light required

◆2nm RMS high phase resolution

◆Just like imaging, easy and fast optical path construction

◆Supports collimated beams and high NA non-collimated beams

◆Extremely strong anti-vibration performance, no need for optical vibration isolation


 Application Of BOJIONG Ultraviolet Wavefront Sensor


This BOJIONG Ultraviolet Wavefront Sensor used for optical system aberration measurement, optical system calibration, flat (wafer) surface shape measurement, optical spherical surface shape measurement, etc.


Laser beam wavefront detection

Wavefront detection response of adaptive optics Zernike mode

Example of aberration measurement of optical system

 

Optical system calibration measurement examples

 

Example of wafer surface roughness measurement

 

Micro etching morphology measurement - defect sample 1 # -114 lines


BOJIONG Ultraviolet Wavefront Sensor Details


BOJIONG Ultraviolet Wavefront Sensor developed by a team of professors from Zhejiang University and Nanyang Technological University of Singapore, with domestic patented technology, it combines diffraction and interference to achieve a common four-wave transverse shear interference, with superior detection sensitivity and anti-vibration performance, and can realize real-time and high-speed dynamic interferometry without vibration isolation. The real-time measurement shows a frame rate of more than 10 frames. At the same time, the FIS4 sensor has an ultra-high phase resolution of 512×512 (260,000 phase points), the measurement band covers 200nm~15μm, the measurement sensitivity reaches 2nm, and the measurement repeatability is better than 1/1000λ (RMS). It can be used for laser beam quality analysis, plasma flow field detection, real-time measurement of high-speed flow field distribution, image quality evaluation of optical system, microscopic profile measurement and quantitative phase imaging of biological cells.

 

FIS4 Technical parameters of each series of products

 

Product

FIS4-UV

FIS4-HR

FIS4-UHR

FIS4-HS

FIS4-Cell

FIS4-NIR

Wavelength range

200~450nm

400~1100nm

400~1100nm

400~1100nm

400~1100nm

900~1200nm

Target size mm2

13.3×13.3

7.07×7.07

13.3×13.3

10.24×10.24

7.07×7.07

13.3×13.3

Spatial resolution

26μm

23.6μm

26μm

24.4μm

23.6μm

26μm

Image pixel

-

2048×2048

-

-

2048×2048

-

Phase output resolution

512×512

(262144pixel)

300×300(90000pixel)

512×512(262144pixel)

420×420(176400pixel)

300×300(90000pixel)

512×512(262144pixel)

Phase resolution

<2nmRMS

<2nmRMS

<2nmRMS

<2nmRMS

<2nmRMS

<2nmRMS

Absolute accuracy

10nmRMS

10nmRMS

15nmRMS

10nmRMS

10nmRMS

15nmRMS

Dynamic range

90μm

(256λ)

110μm

(150λ)

162μm

(256λ)

132μm

(210λ)

110μm

(150λ)

270μm

(256λ)

Sampling rate

32fps

24fps

45fps

107fps

24fps

45fps

Real-time processing speed

10Hz

(Full resolution)

10Hz

(Full resolution)

10Hz

(Full resolution)

10Hz

(Full resolution)Supports delayed batch processing

10Hz

(Full resolution)

10Hz

(Full resolution)

Interface type

USB3.0

GIGE

USB3.0

GIGE

GIGE

USB3.0

External interface

-

-

-

-

C port

-

Size mm2

70x46.5x68.5

56.5x43x41.5

70x46.5x68.5

56.5x43x41.5

56.5x43x41.5

70x46.5x68.5

weight

about240g

about120g

about240g

about120g

about120g

about240g

 


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